Micro weighing sensor for micro sensor technology fast development, some of the theory, method and implementation technique is not yet mature, the characteristics of the close combination of the latest developments in the micro sensor, the quantity of heat, radiation, mechanical, magnetic, chemical micro sensors are classified in this paper, the basic theory and implementation technology, and introduces the micro sensor system and its data acquisition and processing knowledge, aims to provide an introduction of the micro sensor. This book helps readers to build basic concepts of micro-sensor design, research, production and experimental analysis on the basis of mastering the basic knowledge of micro sensor. When confronted with specific micro-sensor problems, we can find the professional literature, can read the literature content, can design experiments on our own, and can analyze the experimental results and summarize the results.
The micro sensor is the most successful and most practical micro electromechanical devices, mainly including micro mechanical deformation of the diaphragm produce electrical signal output of miniature pressure sensor and the micro acceleration sensor; In addition, there are micro-temperature sensors, magnetic field sensors, gas sensors, and so on. The areas of these microsensors are mostly under 1 mm2.
With the further development of microelectronic processing technology, especially nano-processing technology, sensor technology will evolve from micro sensor to nanometer sensor. These tiny sensor is small in size, it can realize many new features, easy to mass production and high precision, piece of low cost, easy to form large-scale and multifunctional array, these characteristics make them very suitable for automotive applications.
The vehicle sensor is a general term for various sensors used in automobile display and electronic control system. It involves a lot of physical quantity sensors and chemical sensor. These sensors can be used to make drivers understand the state of the car; It is used to control parts of the car.
The temperature sensor of automobile is mainly used to detect engine temperature, gas temperature, cooling water temperature, fuel temperature and catalytic temperature. The temperature sensor has three main types: thermistor, wire wound resistance and thermocouple resistance. Each of these three types of sensors has its own characteristics and its application is slightly different. Thermistor temperature sensor has high sensitivity and good response characteristics, but the linear difference is low.
Among them, universal measuring temperature range for - 50 ℃ ~ 30 ℃, accuracy was 1.5%, the response time of 10 ms; Type high temperature is 600 ℃ ~ 1000 ℃, the accuracy is 5%, the response time of 10 ms; The precision of the wire wound temperature sensor is high, but the response characteristic is poor. Thermocouple resistive temperature sensor has high precision and wide temperature range, but it needs to be used with amplifier and cold end treatment. Other practical products ferrite type temperature sensor (temperature range for - 40 ℃ ~ 120 ℃, accuracy of 2.0%), metal or semiconductor film air temperature sensor (temperature range for - 40 ℃ ~ 150 ℃, accuracy was 2.0%, 5%, about 20 ms response time), etc.